1 Introduction <br> <br> abrasive water jet is rapidly since the 1880s developed a new technology, and compared to traditional processing techniques, it has no tool wear during processing, non-thermal effects of a small reaction force, processing High flexibility, it has been widely used in a variety of processing industries for the processing of ceramics, quartz, composite materials and other materials.

Abrasive water jet polishing technology is a new type of precision machining technology developed on the basis of abrasive water jet processing technology. At present, there are still few studies on it at home and abroad, and only a few scholars have conducted exploratory experimental research, and have not yet formed systematic research results.

Hashish conducted an exploratory experiment on the feasibility of abrasive liquid jet polishing diamond film. It was found through experiments that the diamond film can be polished from 3μm to 1.3μm with 600 mesh SiC abrasive. When Fahnle, Oliver W et al. used a liquid abrasive jet to polish flat glass, the glass surface roughness was reduced from the initial 475 nm to 5 nm. Booij, Silvia M. and others in the process of polishing liquid jet polishing glass, by adjusting the main process parameters (such as processing time, abrasive concentration, abrasive size and target distance, etc.), it is found that the material removal rate may be controlled within 1nm/min. . Booij, Silvia M. and Fanle, Oliver W. et al. found through experiments that in the polishing process of abrasive liquid jet, by adjusting the trajectory of the nozzle, a plane with a surface accuracy of N10 can be obtained. Messelink and Wilhelmus ACM have experimentally verified that the abrasive liquid jet can pre-polis and polish the spherical surface. The results show that during the polishing process, the material removal speed depends on the sharpness of the abrasive and the kinetic energy. Yang Ganhua and Liu Jiguang and others have experimentally studied that it is feasible to grind and polish the surface of the ferroalloy shaped curved surface by grinding fluid jet, and obtain a reasonable polishing scheme.

When the polishing abrasive water jet mechanism 2 <br> <br> abrasive water jet impact angle workpiece being polished, the abrasive impact on the workpiece can be decomposed into a horizontal component and a vertical component. The horizontal component force produces a convex and flattening action on the peaks on the workpiece, and the vertical component force squeezes the working surface to cause a chilling effect on the surface of the workpiece.

At the beginning of polishing, a portion of the abrasive water jet mixture is retained in the valleys of the workpiece surface to form a film. The peaks exposed outside the film are first removed by the impact of the abrasive, resulting in a noticeable flatness of the working surface. Typically the surface roughness is on the order of microns, a process commonly referred to as primary polishing (ie, coarse polishing). In this process, the amount of material removed is large, and a larger abrasive material is required. The material removal mechanism is currently considered to be similar to that of a conventional abrasive water jet. In the abrasive water jet polishing process, there are two main mechanisms for the abrasive to remove the surface material of the workpiece. One is caused by the plastic deformation mechanism. The impact of the abrasive on the surface of the workpiece causes the material to bulge to both sides. This process does not directly cause The cutting process of the material, but under the action of the subsequent abrasive particles, the material is detached to form secondary chips. At the same time, the abrasive particles also have a cutting process on the surface of the workpiece, such as planing. This process can directly remove the material and form a chip. The other is to remove the material by collision impact and shear scribe action of the polishing liquid mixed with the abrasive particles.

After rough polishing, only a small peak is left on the surface of the workpiece. At this time, the horizontal impact component is reduced, and the vertical impact component is increased, so that the pressing effect of the abrasive on the working surface is enhanced. This process is usually It is called secondary polishing, that is, fine polishing. In this process, the amount of material removed is small and fine particle abrasives are required. The removal mechanism of the material at this stage is still in the research stage. Some scholars believe that when the material removal scale is nano-scale, since the removal depth is less than its critical depth of cut, plastic flow becomes the main way of material removal. The effect of nano-scale abrasive on the workpiece is mainly extrusion grinding.

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